FABRICATION OF SURFACE EMISSION LASER DIODE HAVING POLARIZATION CHARACTERISTICS CONTROLLED BY INCLINING RESONATOR

摘要

PROBLEM TO BE SOLVED: To control the polarizing direction of emitted light easily while sustaining the symmetry of oscillation beam from a vertical resonance surface emission laser diode by etching a resonance layer while inclining in the direction of <110> or <1-10>. SOLUTION: A lower mirror layer 2, an active layer 3 and an upper mirror layer 4 are formed sequentially on a GaAs substrate 1 and then a conductive metal is deposited and patterned to form an n-type electrode 5 followed by sequential deposition of Au, as an etching substance, by 1000-5000Åand Ni by 500-2000Å. It is then patterned to form a metal mask pattern 6, i.e., an etching mask for underlying part forming substance, and an exposed upper mirror layer 4 and active layer 3 are subjected to reactive ion etching or ion beam etching while inclining by 5-45 in the direction <110> or <1-10>. According to the method, the polarizing direction can be determined by a simple method without causing significant deviation of the oscillation beam of laser diode from circular symmetry.