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发明名称
Ausrichtsystem, insbesondere für Röntgen- oder Photolithographie
摘要
申请公布号
DE69127218(D1)
申请公布日期
1997.09.18
申请号
DE19916027218
申请日期
1991.04.03
申请人
KARL SUESS KG PRAEZISIONSGERAETE FUER WISSENSCHAFT UND INDUSTRIE - GMBH & CO, 85748 GARCHING, DE
发明人
KAISER, PAUL, W-8000 MUENCHEN, DE
分类号
G03F9/00;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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