Micro-mechanical mirror arrangement with grid of individually disengageable mirror components

摘要

The arrangement has each of the mirror components (18) pivotably located around two pivot axes crossed in relation to one another via micro-mechanical locating devices. The micro-mechanical locating devices of each of the mirror components (18) are arranged in the area of the mirror surface of the mirror component. The mirror components connect to each other with reduced clearance. The locating devices (20) have a cardan frame (12) behind the mirror components (18). The cardan frame is connected via a first pair of opposing bending links (16) in a first plane with the mirror component. This allows the mirror component to be tippable relatively to the cardan frame around an axis located in the first plane. The tipping is performed via four quadratic electrodes (22).