发明名称 |
Measuring method and apparatus for measuring system having measurement error changeable with time |
摘要 |
A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.
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申请公布号 |
US5847974(A) |
申请公布日期 |
1998.12.08 |
申请号 |
US19950520641 |
申请日期 |
1995.08.29 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MORI, TETSUZO;SENTOKU, KOICHI;MATSUMOTO, TAKAHIRO;HASEGAWA, NORIYASU |
分类号 |
G01B11/00;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G01B11/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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