发明名称 Measuring method and apparatus for measuring system having measurement error changeable with time
摘要 A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.
申请公布号 US5847974(A) 申请公布日期 1998.12.08
申请号 US19950520641 申请日期 1995.08.29
申请人 CANON KABUSHIKI KAISHA 发明人 MORI, TETSUZO;SENTOKU, KOICHI;MATSUMOTO, TAKAHIRO;HASEGAWA, NORIYASU
分类号 G01B11/00;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G01B11/00 主分类号 G01B11/00
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