Method for automated energy dose measurement and adjustment for a photoaligner

摘要

A Visual Basic software program to automate the procedures required for energy dose verification and adjustment of the ASM photoaligner. The software program has the capability of manipulating the ASM photoaligner through a resident software routine of the photoaligner. In addition, the software program has a user interface which prompts the operator for inputs and instructs the operator on what is required to perform the energy dose calibration. This ensures a reproducible procedure regardless of the photoaligner being tested or the operator doing the testing. Automating this procedure allows changing the photoaligner energy dose through the ASM Machine Constants (values stored in the ASM photoaligner that control the operation of the photoaligner). If the input data is out of specification the program will either reference a trouble shooting guide or request that the specific procedure be repeated for verification. After collecting the data from the operator, the program makes the necessary calculations and compares the results to a predefined data base which contains the specification limits for each of the individual photoaligners. Besides saving time, automating these procedures ensures that all operators perform them the same way, thereby eliminating operator-to-operator variation. Furthermore, it will no longer be necessary to open the ASM electronics cabinet to adjust the shutter control board potentiometer for brining the dose back to specification and by making the changes through software it will be possible to track them over time.