| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required for transferring a substrate by providing a finger for holding a plurality of substrates simultaneously having a structure suitable for the positional relationship of each substrate under a contained state, and means for transferring the holding finger at least in the horizontal direction. SOLUTION: A transfer mechanism 45 transfers a finger holder 46 into an outer cassette 5 and elevates each finger 44 from slightly below each substrate 9 to mount each substrate 9 on each holding finger 44. The transfer mechanism 45 then transfers the finger holder 46 to a centering unit and align the central axis of the holding finger 44 with a reference axis 48a. Subsequently, shift of the center is calculated for each substrate 9 and stored in a memory means 473 and then the transfer mechanism 45 transfers the finger holder 46 to a cassette 31 in a lock. Thereafter, each substrate 9 is contained and lowered slightly and each holding finger 44 is retracted to a specified waiting position. Since a plurality of substrates can be transferred collectively, the transferring time can be shortened. |
