| 摘要 |
PROBLEM TO BE SOLVED: To provide a board treating equipment wherein disconnections of a power feeder line and leakages can be prevented. SOLUTION: A board carrying mechanism 1 consists of the following: a pedestal 11 fixed on a board treating equipment main body 1, a moving member 12 constituted of a drive unit 13 involving motors 26, 27 and sensors 36, 37 and a retaining stand 14, a pair of link mechanisms 15, 16, a drive mechanism 17 for elevating and driving the moving member 12, and a feeder 18 connected with the link mechanism 15. Power supplying to the motors 26, 27 and the sensors 36, 37 is executed by using the link mechanisms 15, 16. |
