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发明名称
EXPOSE APPARATUS
摘要
申请公布号
KR0163091(B1)
申请公布日期
1999.02.01
申请号
KR19950004993
申请日期
1995.03.10
申请人
SAMSUNG AEROSPACE INDUSTRIES LTD.
发明人
KIM, CHANG-KYU
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
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