发明名称 PATTERN FORMING EQUIPMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a pattern forming equipment for actually measuring the turning angle reference data and angle position deviation reference data of a table in the respective pattern formation devices beforehand, and correcting the angle position deviation of a body to be pattern-formed based on such data. SOLUTION: This device loads the body to be pattern-formed on a freely rotatable table and forms a prescribed pattern. A turning angle reference data of the table, and an angle position deviation reference data of the table to a prescribed reference direction, are actually measured and then stored in a look-up table as a data storage means corresponding to each other. The angle position deviation data of the body to be pattern-formed loaded at an appropriate position on the table are detected by angle position deviation data detection means 30A and 30B. Based on the angle position deviation data, turning angle correction data corresponding to them are read from the data storage means and the angle position deviation of the body to be pattern formed is dissolved by the turning of the table based on them.</p>
申请公布号 JPH11102954(A) 申请公布日期 1999.04.13
申请号 JP19970281447 申请日期 1997.09.29
申请人 ASAHI OPTICAL CO LTD;FUJITSU LTD 发明人 OKUYAMA TAKASHI;MAEDA RYUJI;KAMIMURA MITSUGI;URAKUCHI MASAHIRO
分类号 G03F9/00;H01L21/027;H01L21/68;(IPC1-7):H01L21/68 主分类号 G03F9/00
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