发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To simplify the manufacture process of a semiconductor device for surface mounting, which is provided with a projecting electrode, to improve yield and to reduce cost. SOLUTION: An insulating film 16 having an opening part 16a so that the peripheral edge part of an electrode pad 14 is coated and the inner side is exposed is formed on a semiconductor substrate 12 where an integrated circuit is provided. Projecting photosensitive resin 20 is formed on the electrode pad 14 so that an exposure part 14a where a part is not coated is left. A projecting electrode film 23 connected to the exposure part 14a of the electrode pad 14 is formed on the surface of projecting photosensitive resin 20 by a nonelectrolytic plating method or a sputtering method.
申请公布号 JPH11233545(A) 申请公布日期 1999.08.27
申请号 JP19980317057 申请日期 1998.11.09
申请人 CITIZEN WATCH CO LTD 发明人 TAGUCHI NOBORU
分类号 H01L21/288;C23C18/31;H01L21/3205;H01L21/60;H01L23/52;(IPC1-7):H01L21/60;H01L21/320 主分类号 H01L21/288
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