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摘要
申请公布号
JP2959711(B2)
申请公布日期
1999.10.06
申请号
JP19970126780
申请日期
1997.05.16
申请人
HITACHI SEISAKUSHO KK
发明人
NAGATA KOJI;OKUMURA MASAHIDE
分类号
G03F7/20;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
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