| 摘要 |
PURPOSE: A mutual connection structure and a manufacturing method thereof is provided to prevent fluorine compounds for damaging a mutual connection and a mechanical functions by using a metal and an insulator having capping and liner matters. CONSTITUTION: The mutual connection structure and a manufacturing method thereof comprises: one more layers of a fluorinated dielectric insulator(250); one more layers of a conductive wiring pattern connected electrically by a conductive via; the conductive wiring pattern and the conductive via being isolated from the fluorinated dielectric insulator(250) by one more selected fluorine-resistant capping materials(274) of groups comprising Ag, AL, AL-Ti, Co, Cr, Cu, In, Ir, Mg, Mn, Pd, Pt, Sn, oxides of the elements, fluoride, nitride, silicide, mixtures of the compounds, DLC containing Si, and DLC containing Si-O. |
