| 摘要 |
<p>A probe comprises a cantilever (109) having a movable end and formed from an elastic body, an electrocoductive sensing needle (110) arranged at the movable end of the cantilever, and a field effect transistor (T1,106,107,108) arranged at the movable end of the cantilever and having a gate electrode (106) electrically connected to the electrocoductive sensing needle. The probe may further comprises another field effect transistor (T2) formed on the cantilever and having its drain (D2) electrically connected to said electrocoductive sensing needle. An information recording/reproduction apparatus using the probe is provided. A method of manufacturing a probe comprises steps of preparing a substrate (101,102,103) at least having a semiconductor layer on the surface, forming a field effect transistor having a gate electrode (106) in the semiconductor layer, forming an electrocoductive sensing needle (11,110) on the gate electrode (106) and processing the substrate to produce a movable end (109) out of the portion thereof where the field effect transistor is formed.</p> |
