| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a process of treating metallic fuse by which the yield of a metallic fuse can be improved by avoiding the excessive etching of the fuse. SOLUTION: This process of treating metallic fuse is provided for treating a metallic fuse using a thin oxide 108 (having a thickness of about 6,000Å) on a top interconnecting body 102. In performing inspections, the oxide 108 is removed from the surface of a probe pad 106, but not removed from the surface of a fuse 104. Since the oxide 108 has a thin thickness at the upper corner of the fuse 104, the oxide 108 causes crazing on the fuse 104 while the oxide 108 is irradiated with a laser pulse 114. Thereafter, the exposed fuse 104 is dissolved by wet etching.</p> |
