发明名称 |
PRODUCTION OF VITREOUS CARBON SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily producing a homogeneous vitreous carbon formed body with little defects such as pores. SOLUTION: A phenol resin soln. is poured into a casting vessel to be cast into a plate, which is then fired and carbonized at >=800 deg.C in an inert gas atmosphere to produce a vitreous carbon substrate. In this method, the phenol resin soln. is poured and cast in the casting vessel which is controlled to have >=100 dyn/cm surface tension of the inner bottom face and <100 dyn/cm surface tension of the inner side face. |
申请公布号 |
JP2000095566(A) |
申请公布日期 |
2000.04.04 |
申请号 |
JP19980266110 |
申请日期 |
1998.09.21 |
申请人 |
UNITIKA LTD |
发明人 |
MORI JUNICHI;SAITO MINORU;NAKANISHI KIYOTAKA;YOSHIMURA KAZUKO;YOSHINO TAKEMASA |
分类号 |
C04B35/52;C01B31/02;C08L61/06;C10B57/04;H01L21/66 |
主分类号 |
C04B35/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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