发明名称 PRODUCTION OF VITREOUS CARBON SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for easily producing a homogeneous vitreous carbon formed body with little defects such as pores. SOLUTION: A phenol resin soln. is poured into a casting vessel to be cast into a plate, which is then fired and carbonized at >=800 deg.C in an inert gas atmosphere to produce a vitreous carbon substrate. In this method, the phenol resin soln. is poured and cast in the casting vessel which is controlled to have >=100 dyn/cm surface tension of the inner bottom face and <100 dyn/cm surface tension of the inner side face.
申请公布号 JP2000095566(A) 申请公布日期 2000.04.04
申请号 JP19980266110 申请日期 1998.09.21
申请人 UNITIKA LTD 发明人 MORI JUNICHI;SAITO MINORU;NAKANISHI KIYOTAKA;YOSHIMURA KAZUKO;YOSHINO TAKEMASA
分类号 C04B35/52;C01B31/02;C08L61/06;C10B57/04;H01L21/66 主分类号 C04B35/52
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