INSULATION MATERIAL FOR ALUMINIUM AND COPPER METALIZATIONS

摘要

Poly-o-hydroxyamides with divalent polynuclear (hetero)aromatic residues in the polymer chain. Poly-o-hydroxyamides of formula (I), in which M1 = -CO-Y3-CO-; M2 = -NHZ2(OR1)2NH-COY3CO-; M3-M5 = -NHZ1(OR1)2NH-COY2CO-, -X1COY4CO- or -X2COY5CO-; M6 = -NHZ3(OR1)2NH-; Z1-Z3 = various tetravalent (hetero)aromatic groups, based e.g. on -Phe-C(Ph)2)-Phe-, -Phe-O-Ada-O-Phe- (for Z2; 8 groups listed) or on benzene (1,2,4,5), naphthalene (2,3,6,7 or 1,2,5,6), furan-tetrayl etc. (for Z1 and Z3; 11 groups listed); Y1-Y5 = various divalent (hetero)aromatic or other groups based e.g. on benzene, naphthalene, pyrazine, furan, pyridine, biquinolyl, norbornene etc. (21 groups listed); X1, X2 = various ester, carbonate, ether, ketone or amide groups; A = (a) H, -CO(CH2)kCH3, -COCH=CH2, -CO-aryl etc. (if a = 0 and/or f = 1; 14 groups listed) or (b) OH, amino, -OCH2CH=CH2, aryloxy etc. (if a = 1 and/or f = 0; 9 groups listed); R1 = H, -(CH2)iCH3, -(CH2)iPh, -COO(CH2)iCH3 or -COO(CH2)iPh; Ph = phenyl; Phe = phenylene; Ada = adamantylene; a, f = 0 or 1; b = 1-200; c = 0-200; d, e = 0-50; i = 0-10 . Full definitions are given in the DEFINITIONS (Full Definitions) field. Independent claims are also included for (1) (1) polybenzoxazoles (PBO) obtained from (I) (2) (2) a method (M1) for the production of (I) by reacting monomers of formula H2N-Z(OR1)2-NH2 (II) with dicarboxylic acids or activated derivatives thereof of formula L-CO-Y-CO-L (III) (3) (3) a method (M2) for the production of PBO by heating (I) (4) (4) electronic components (EC) with a dielectric containing PBO as above (5) (5) a method (M3) for the production of EC by coating a substrate with a solution of (I), evaporating the solvent, heating the resulting film to form PBO, structuring the PBO film to form a resist with trenches, depositing a conductive material on the relief so as to fill the trenches and then removing excess conductive material (6) (6) a method (M4) for the production of EC by coating a solution of (I) onto a substrate with trenches between metallic surface structures, evaporating the solvent so that the trenches are filled with (I) and then heating to form PBO . Z = Z1, Z2 or Z3; Y = Y1-Y5; L = OH or an activating group .