COOLED DEVICE FOR PLASMA DEPOSITING A BARRIER LAYER ONTO A CONTAINER

摘要

The invention relates to a device (1) for plasma depositing a thin layer made of a barrier material onto an inner wall container (2), this device (1) comprising: an electromagnetic wave generator (3); a cavity (5) connected to the generator (3) and made of a conductive material, and a chamber (6) located inside the cavity (5) and made of a material transparent to electromagnetic waves coming from the generator (3). This device (1) is characterized in that it comprises means (14, 15; 16) for cooling the chamber (6).