METHOD FOR DRIVING OF SUBSTRATE CLEANING APPARATUS

摘要

A method for driving a substrate cleaning device is provided to improve the reliability and efficiency of the substrate cleaning device by controlling automatically a gap between upper and lower brushes. A gap data between brushes is measured(S10). A real transmit distance is calculated according to a thickness of a substrate by using the gap data(S20). The gap of the brushes is regulated automatically according to the calculated transmit distance of the brushes(S30). The cleaning process is performed to the substrate(S40).