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发明名称
Rohrkathode für die Verwendung bei einem Sputterprozess
摘要
申请公布号
DE502005001840(D1)
申请公布日期
2007.12.13
申请号
DE200550001840T
申请日期
2005.08.02
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
SCHUHMACHER,MANFRED;JOOS,GERHARD
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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