APPARATUS AND METHOD FOR PREVENTING HAZE GROWTH ON A SURFACE OF A SUBSTRATE
摘要
An apparatus and method for preventing haze growth on a surface of a substrate are disclosed. The apparatus includes a container operable to store a substrate and a gas source coupled to the container. The gas source is operable to dispense a gas into the container in order to prevent a haze from growing on a surface of the substrate.
申请公布号
WO2007095488(A3)
申请公布日期
2007.12.13
申请号
WO2007US61973
申请日期
2007.02.12
申请人
TOPPAN PHOTOMASKS, INC.;FRYE, ETHAN M.;FRISA, LARRY E.