| 摘要 |
PROBLEM TO BE SOLVED: To provide a stannane gas supply system capable of supplying stannane gas to an extreme ultraviolet light radiation source in a stable flow rate. SOLUTION: This is a stannane gas supply system to supply stannane gas to the extreme ultraviolet light radiation source and is equipped with a closed container which is connected to the extreme ultraviolet light radiation source through a piping and in which a mixture of stannane liquid and stannane gas is contained, a cooling means for cooling the closed container colder than -60°C, a low-pressure mass-flow controller installed in the piping, a pressure detector which is installed in the piping between the closed container and the low-pressure mass-flow controller and detects the pressure of the stannane gas at the piping portion, and a control means which controls cooling degree of the closed container by the cooling means based on the detected pressure value by the pressure detector. COPYRIGHT: (C)2008,JPO&INPIT |
