发明名称 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
摘要 |
A slurry composition includes an acidic aqueous solution and one or both of, an amphoteric surfactant and a glycol compound. Examples of the amphoteric surfactant include a betaine compound and an amino acid compound, and examples of the amino acid compound include lysine, proline and arginine. Examples of the glycol compound include diethylene glycol, ethylene glycol and polyethylene glycol.
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申请公布号 |
US7402261(B2) |
申请公布日期 |
2008.07.22 |
申请号 |
US20050205029 |
申请日期 |
2005.08.17 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SO JAE-HYUN;MOON SUNG-TAEK;LEE DONG-JUN;KIM NAM-SOO;AHN BONG-SU;KANG KYOUNG-MOON |
分类号 |
C09K13/00;B24B37/00;C09K3/14;H01L21/304 |
主分类号 |
C09K13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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