| 摘要 |
An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.
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