METHOD FOR MANUFACTURING THIN FILM OR POWDER, APPARATUS FOR MANUFACTURING THIN FILM OR POWDER, METHOD FOR MANUFACTURING ELECTRODE MATERIAL FOR NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY, ELECTRODE FOR NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY, AND NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY

摘要

PROBLEM TO BE SOLVED: To provide: a method for manufacturing a thin film or a powder which is excellent in economical advantage and productivity and by which the vapor deposition rate is enhanced, and a base material and a deposited film can be protected from heat when a raw material is heated; an apparatus for manufacturing the thin film or the powder; a method for manufacturing an electrode material for a non-aqueous electrolyte secondary battery; an electrode for the non-aqueous electrolyte secondary battery using the electrode material; and the non-aqueous electrolyte secondary battery.

SOLUTION: In the method for manufacturing the thin film, comprising evaporating a raw material 3 in a vessel 2 by heating the raw material 3 to a temperature of ≥600 °C under reduced pressure with a heating source 4 and then vapor depositing a thin film on a base material 16 by condensing the vapor of the raw material 3, a heat insulating member 7 is installed between the vessel 2 and the base material 16 to suppress heating of the base material 16 by the heat from the heating source 4 of the raw material 3. An opening part is provided in the heat insulating member 7, and the vapor is introduced to the base material 16 through the opening part. The heat insulating member 7 includes a porous heat insulating material for reducing the thermal conductivity and the radiation heat.

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