Radiation detector and fabrication process

摘要

A monolithic integrated radiation detector includes a photodetector and a scintillator deposited directly on the photodetector. Preferably the photodetector is silicon and the scintillator is a rare earth phosphor. The rare earth phosphor is crystal lattice matched to the silicon by a transitional layer epitaxially grown therebetween.

主权项

1. A monolithic integrated radiation detector comprising:
a substrate of single crystal semiconductor material; a photodetector.of a single crystal material formed on and crystal lattice matched to the substrate; and a scintillator of single crystal material formed on and crystal lattice matched to the photodetector.