发明名称 SEMICONDUCTOR DEVICE INCLUDING EMBEDDED CRYSTALLINE BACK-GATE BIAS PLANES, RELATED DESIGN STRUCTURE AND METHOD OF FABRICATION
摘要 A semiconductor device is disclosed. The semiconductor device can include a first dielectric layer disposed on a substrate; a set of bias lines disposed on the first dielectric layer; a second dielectric layer disposed on the first dielectric layer and between the set of bias lines, wherein a thickness of the second dielectric layer is less than a thickness of the first dielectric layer; a patterned semiconductor layer disposed on portions of the second dielectric layer; and a set of devices disposed on the patterned semiconductor layer above the set of bias lines.
申请公布号 US2016163879(A1) 申请公布日期 2016.06.09
申请号 US201615009906 申请日期 2016.01.29
申请人 GLOBALFOUNDRIES Inc. 发明人 Adam Thomas N.;Cheng Kangguo;Khakifirooz Ali;Reznicek Alexander;Sreenivasan Raghavasimhan
分类号 H01L29/786;H01L29/06;H01L29/423;H01L27/12 主分类号 H01L29/786
代理机构 代理人
主权项 1. A semiconductor device comprising: a first dielectric layer disposed on a substrate; a set of bias lines disposed on the first dielectric layer; a second dielectric layer disposed on the first dielectric layer and between the set of bias lines, wherein a thickness of the second dielectric layer is less than a thickness of the first dielectric layer; a patterned semiconductor layer disposed on portions of the second dielectric layer; and a set of devices disposed on the patterned semiconductor layer above the set of bias lines.
地址 Grand Cayman KY