Coating method, and method of forming organic layer using the same

摘要

A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.

主权项

1. A coating method, comprising:
positioning a coating target on a stage in a coating apparatus; applying a coating material onto the coating target using a coating part; and supplying heat to the coating target, after applying the coating material onto the coating target, using a heating source, the heating source being opposite to and spaced apart from the stage in the coating apparatus, wherein, immediately after completing application of the coating material onto the coating target, the coating material is maintained stationary until completion of the heat supplying, and wherein the supplying of heat to the coating target includes moving the heating source along a vertical axis, the vertical axis being parallel to a normal to the stage.