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发明名称
SPATTERING APPARATUS
摘要
申请公布号
JPS5333985(A)
申请公布日期
1978.03.30
申请号
JP19770108720
申请日期
1977.09.09
申请人
HEWLETT PACKARD YOKOGAWA
发明人
JIYON TOOMASU HAUTON JIYUNIA;UIRIAMU JIYOOJI SHIYUMEITO
分类号
C23C14/36;C23C14/35;H01J37/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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