| 摘要 |
PROBLEM TO BE SOLVED: To provide a pallet which can mount a part with high working efficiency. SOLUTION: This part mounting device has a control circuit which controls an X-axis motor, a Y-axis motor, a Z-axis motor, a rotary motor, and a positioning recognition camera and which sequentially picks up images of recognition holes 83a, 83b, 83c and 83d formed an a pallet 80b. A distance and a direction of a shift between a position on which the pallet 80b is practically placed and a position an which the pallet 80b should originally be placed is determined by the control circuit based an the images of the recognition bales 83a-83d picked up by the positioning recognition camera and a position of the recognition holes 83a-83d arranged under a normal condition in a sucking position which is stored in a storage circuit. Then the control circuit corrects a position where a semiconductor chip 1a to be mounted is sucked by a nozzle based on the determined distance and direction of the shift.
|
