| 摘要 |
PURPOSE: To ensure high sensitivity from a small variation in oscillatory mass by constituting a capacitive accelerometer of two capacitors having a common movable electrode acting as the oscillatory mass of accelerometer. CONSTITUTION: The accelerometer has a layer structure of side face electrode structure 15 and central electrode structure interconnected electrically wherein the oscillatory mass 1 of central electrode structure 16 is provided by a chip part of a cantilever beam 17. The integral central electrode structure 16 includes the cantilever beam 17 comprising an oscillation unit 1, a flexible stem part 2, and an accelerometer body element 3 surrounding the cantilever beam 17. Capacitance of the accelerometer is formed between the common movable electrode 1 in central electrode structure 16 and the side face electrode 4 secured to side face electrode structure 15. The stem part 2 is essentially made thinner than the chip part. |
