| 摘要 |
PROBLEM TO BE SOLVED: To produce a member for an ion injector from the carbon member and having resistance to abrasion due to ion beams, etc., without generating carbon dust or adsorbing a gas and to provide a method for producing the carbon member. SOLUTION: This carbon member for an ion injector comprises graphite in the ion injector where ion beams collide or come into contact therewith and has a glassy carbon impregnated layer in an area extending from the surface to the interior thereof and further a glassy carbon coating layer having >=3H surface hardness expressed in terms of pencil scratch value on the surface of the carbon impregnated layer. The method for producing the carbon member comprises forming the glassy carbon impregnated layer having >=1,000 μm thickness in the area extending from the surface to the interior of the graphite in the form of the carbon member comprising the graphite in the ion injector where the ion beams collide or come into contact therewith and forming the glassy carbon coating layer having >=3H surface hardness expressed in terms of the pencil scratch value and 1-5 μm thickness on the surface of the glassy carbon impregnated layer. |
