FORMATION OF THIN FILM,申请号JP19890212599-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPH0375374(A)	申请公布日期	1991.03.29
申请号	JP19890212599	申请日期	1989.08.18
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	C23C16/44;C23C16/50;C23C16/511;C23C16/54;H01L21/31;H01L21/314	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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