发明名称 HEAT TREATMENT OF FLUORITE SINGLE CRYSTAL AND PROCESSING METHOD FOR FLUORITE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To diminish operation time without damaging fluorite single crystal by specifying heating rate up to a preferred temperature in a specific range. SOLUTION: When heat-treating fluorite single crystal, heating rate up to a preferred temperature lower than that of its melting point is set so as to become >=20 deg.C/h. and <150 deg.C/h. When the heating rate is 100 deg.C/h., the yield of fluorite single crystal is excellent as much as that when the heating rate is <=20 deg.C/h. When the heating rate is >=50 deg.C/h., the heating operation time becomes <=1/2 and is extraordinarily shortened. The preferred temperature is preferably the highest one in the total excursion of heat treatment. The heat treatment of fluorite single crystal is usually conducted at about 1,000 deg.C and the above heating rate for heating the single crystal up to the set temperature is adopted without any problem even when such high temperature is set, which leads to the improvement in efficiency because one-step heating rate up to the highest temperature is adopted.
申请公布号 JP2000128700(A) 申请公布日期 2000.05.09
申请号 JP19980310330 申请日期 1998.10.30
申请人 NIKON CORP;OYO KOKEN KOGYO KK 发明人 SAKUMA SHIGERU;TAKANO SHUICHI
分类号 B28D5/02;C30B29/12;C30B33/02;G02B1/02;G02B1/11 主分类号 B28D5/02
代理机构 代理人
主权项
地址