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发明名称
PRODUCTION OF SPUTTERING TARGET
摘要
申请公布号
JPH0762529(A)
申请公布日期
1995.03.07
申请号
JP19930211673
申请日期
1993.08.26
申请人
KAWASAKI STEEL CORP
发明人
NEMOTO TAKENAO
分类号
C23C14/34;H01L21/3205;H01L23/52;(IPC1-7):C23C14/34;H01L21/320
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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