发明名称 |
Method for forming electrical contact to the optical coating of an infrared detector using conductive epoxy |
摘要 |
This is a system and method of forming an electrical contact to the optical coating of an infrared detector using conductive epoxy. The method may comprise: forming thermal isolation trenches 22 and bias contact vias 23 in a substrate 20; depositing a trench filler 24 in the thermal isolation trenches 22; depositing conductive epoxy 50 into the bias contact vias 23; replanarizing; depositing a common electrode layer 31 over the thermal isolation trenches 22 and vias 23; depositing an optical coating 26 above the common electrode layer 31; mechanically polishing a backside of the substrate 20 to expose the trench filler 24 and conductive epoxy 50; depositing a contact metal 34 on the backside of the substrate 20; etching the contact metal 34 and the trench filler 24 to form pixel mesas of the contact metal 34 and the substrate 20.
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申请公布号 |
US5608254(A) |
申请公布日期 |
1997.03.04 |
申请号 |
US19950473838 |
申请日期 |
1995.06.07 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
FRANK, STEVEN N.;BELCHER, JAMES F.;STANFORD, CHARLES E.;OWEN, ROBERT A.;KYLE, ROBERT J. S. |
分类号 |
H01L21/60;H01L31/0224;(IPC1-7):H01L31/023 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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