发明名称 |
Polishing apparatus having robotic transport apparatus |
摘要 |
A robotic transport apparatus is capable of providing an effective waterproofing function of working components without using mechanical seals. The robotic transport apparatus includes a robot body, an arm assembly extendably attached to the robot body, and a workpiece holding section attached to the arm assembly. A pan member for waterproofing of the robot body is provided above the robot body and has an area not smaller than the workpiece holding section.
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申请公布号 |
US5893794(A) |
申请公布日期 |
1999.04.13 |
申请号 |
US19970808690 |
申请日期 |
1997.02.28 |
申请人 |
EBARA CORPORATION |
发明人 |
TOGAWA, TETSUJI;YAMAGUCHI, KUNIAKI;SAKURAI, KUNIHIKO |
分类号 |
B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B24B7/06 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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