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发明名称
摘要
申请公布号
JP2901412(B2)
申请公布日期
1999.06.07
申请号
JP19920098982
申请日期
1992.02.28
申请人
KYUSHU NIPPON DENKI KK
发明人
NAGAI SHINICHI
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
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