Wafer prober having an emissive display inspection system and method of use

摘要

An inspection system (20) has an image capture device (10) that is mounted onto a wafer prober (15) for the electrical verification of electronic components (60) having an emissive display (61). The image capture device (10) includes a lens (31) that collects the image generated by the emissive display (61). The image is passed to mirrors (36,37) which redirect a portion of the image into a pickup device (41). The emissive display (61) is partitioned into subregions (62-65) to facilitate the capturing of the image. As the image of each of the subregions (62-65) is collected by image capture device (10), the other subregions (62-65) are deactivated.