METHOD OF FABRICATING DISTRIBUTED REFLECTION MULTILAYER MIRROR

摘要

In a method for fabricating distributed reflection multi-layered film mirrors consisting of a plurality of laminated thin films (102 and 103) having a different refractive index, the thin films (102 and 103) are formed using a liquid phase film formation method. The liquid phase film formation method includes a step of applying thin film materials forming the thin films, and a step of drying the applied the thin film materials. The liquid phase film formation method utilizes an ink jet method. Thin films can be formed in fine patterns with ease and in a short amount of time. Laminated layers with high reliability can be obtained in very fine patterns. The reflection properties such as film thickness and reflectance of distributed reflection multi-layered film mirrors can be controlled with ease. <IMAGE>