PROCEDE DE FABRICATION DE COUCHES DE CARBONE APTES A EMETTRE DES ELECTRONS, PAR DEPOT CHIMIQUE EN PHASE VAPEUR

摘要

The invention concerns a method for making a carbon film capable of emitting electrons, under the action of an electric field, by plasma chemical vapour deposition. It consists in performing the process in a sealed chamber (1) comprising a first electrode (3) supporting a substrate (7) and a second electrode (5); introducing in the chamber proximate to the second electrode (in 11) a gas mixture containing a carbonaceous gas, under pressure ranging from 0.13 to 13.33 Pa; heating the substrate to a temperature ranging between 300 to 800 DEG C, and applying a radiofrequency power to the second electrode (5) to produce a plasma (21) by ionizing the gas mixture and in depositing on the carbon substrate in the form of carbon nanostructures curved sheets with radius of curvature ranging between 2 and 50 nm.