| 摘要 |
PROBLEM TO BE SOLVED: To easily and reproducibly form a reflection electrode having an optimum reflection characteristics by forming a connection part between a liquid crystal pixel drive circuit and the reflection electrode on an insulation film formed downward the reflection electrode and forming irregularly arranged recessed parts on the area excepting the connection part in the insulation film. SOLUTION: A first conductive layer 8a with a source area 6a through a contact hole formed on a first inter-layer insulation film 7, and the first conductive layer 8b with a drain electrode 6b are respectively electrically connected, and the source electrode and the drain electrode of an FET are constituted. The connection part between the liquid crystal pixel drive circuit and a third conductive layer (reflection electrode) 13 is formed on a third inter-layer insulation film 11a formed downward the third conductive layer 13. Then, the third inter-layer insulation film 11a is formed upward a second conductive layer 10b. After the third inter-layer insulation film 11a is formed, the recessed parts 11b irregularly arranged on the area excepting the connection part between the second conductive layer 10b and the reflection electrode 13 are formed by dry etching. |
