METHOD AND APPARATUS FOR ION MASS SEPARATION, AND ION- DOPING APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform ion mass separation for a large-diameter ion beam. SOLUTION: This apparatus comprises an air core exciting current path 21 formed in the required length by winding a conductor 20 at prescribed intervals helically so as to pass through an entry part 18 and an exit part 19 in an external of an ion deflection casing 17 having the entry part 18 and the exit part 19, an ion extraction electrode 26 arranged in the interval position overlapping with the conductor 20 in the entry part 18, an apparatus 16 for generating ion adjacent to the ion extraction electrode 26, and an ion acceleration electrode 27 arranged in the exit part 19.