Electric contact element for semiconductor device, has body with contact surface coated with contact layer having nanocomposite film with matrix of amorphous carbon, where metal carbide is embedded into contact layer

摘要

The element has a body (3) with one contact surface coated with a contact layer (4) which is applied against a contact member (2). The contact layer comprises a nanocomposite film having a matrix of amorphous carbon and crystallites of nano-size ranging in specific dimensions. Metal carbide is embedded into the contact layer for making an electric contact to the contact member which enables electric current to flow between the element and the contact member. An independent claim is also included for a sliding contact arrangement.