发明名称 Method of manufacturing group-III nitride crystal
摘要 There is provided a method of manufacturing a group-III nitride crystal in which a nitrogen plasma is brought into contact with a melt containing a group-III element and an alkali metal to grow the group-III nitride crystal. Furthermore, there is also provided a method of manufacturing a group-III nitride crystal in which the group-III nitride crystal is grown on a substrate placed in a melt containing a group-III element and an alkali metal, with a minimal distance between a surface of the melt and a surface of the substrate set to be at most 50 mm.
申请公布号 US7288151(B2) 申请公布日期 2007.10.30
申请号 US20040999338 申请日期 2004.11.29
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 SASAKI TAKATOMO;MORI YUSUKE;YOSHIMURA MASASHI;KAWAMURA FUMIO;HIROTA RYU
分类号 C30B11/14;C30B29/38;C30B11/00;C30B11/12;C30B19/02;C30B29/40;H01L21/208 主分类号 C30B11/14
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