发明名称 |
A CUTTING DEVICE FOR SPECIMEN OF TEM |
摘要 |
An apparatus for cutting TEM(Transmission Electron Microscope) sample is provided to precisely control a cutting depth of a sample by controlling rotary speed and load. A pillar is formed in a base(110), and is coupled in one side of a housing(120). A driving motor is coupled in the other side of the housing. A sleeve is positioned in the other side of the housing, and is lifted inside the housing. A rack is formed in an outer circumference of the sleeve. A cutter is fixed in one end of the sleeve, and is coupled in a rotary shaft of the driving motor. A pinion(153) includes a gear part. A reference member(161) is installed in an outer side of the housing. A rotary member(162) is installed in an outer side of the reference member, and is coupled in one end of the pinion. A scale corresponding to lifting distance of the sleeve is formed in an outer circumference of the rotary member.
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申请公布号 |
KR100886574(B1) |
申请公布日期 |
2009.03.05 |
申请号 |
KR20070093178 |
申请日期 |
2007.09.13 |
申请人 |
CHANGWON NATIONAL UNIVERSITY INDUSTRY ACADEMY COOPERATION CORPS |
发明人 |
SHIN, KEE SAM;YOO, JUNG HOON;PARK, DONG HYUN;DONG JILING;YU HUI;HUYNH QUOC BAO;KIM, KYU CHEOL;DO, SANG WOOK;AN, DUG KY;LEE, JAE HYUK |
分类号 |
G01N1/28;H01J37/20;H01L21/02;H01L21/66 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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