发明名称 A CUTTING DEVICE FOR SPECIMEN OF TEM
摘要 An apparatus for cutting TEM(Transmission Electron Microscope) sample is provided to precisely control a cutting depth of a sample by controlling rotary speed and load. A pillar is formed in a base(110), and is coupled in one side of a housing(120). A driving motor is coupled in the other side of the housing. A sleeve is positioned in the other side of the housing, and is lifted inside the housing. A rack is formed in an outer circumference of the sleeve. A cutter is fixed in one end of the sleeve, and is coupled in a rotary shaft of the driving motor. A pinion(153) includes a gear part. A reference member(161) is installed in an outer side of the housing. A rotary member(162) is installed in an outer side of the reference member, and is coupled in one end of the pinion. A scale corresponding to lifting distance of the sleeve is formed in an outer circumference of the rotary member.
申请公布号 KR100886574(B1) 申请公布日期 2009.03.05
申请号 KR20070093178 申请日期 2007.09.13
申请人 CHANGWON NATIONAL UNIVERSITY INDUSTRY ACADEMY COOPERATION CORPS 发明人 SHIN, KEE SAM;YOO, JUNG HOON;PARK, DONG HYUN;DONG JILING;YU HUI;HUYNH QUOC BAO;KIM, KYU CHEOL;DO, SANG WOOK;AN, DUG KY;LEE, JAE HYUK
分类号 G01N1/28;H01J37/20;H01L21/02;H01L21/66 主分类号 G01N1/28
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