发明名称 |
Ceramic material and sputtering target member |
摘要 |
A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2θ=42.38° to 42.89° and further preferably at 2θ=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less. |
申请公布号 |
US9409824(B2) |
申请公布日期 |
2016.08.09 |
申请号 |
US201514692955 |
申请日期 |
2015.04.22 |
申请人 |
NGK Insulators, Ltd. |
发明人 |
Sato Yosuke;Isoda Yoshinori;Katsuda Yuji |
分类号 |
C04B35/053;C04B35/04;H01L43/10;H01L43/12;G11B5/39;C23C14/08;C23C14/34;G01R33/09;C01G25/00;G01R33/00 |
主分类号 |
C04B35/053 |
代理机构 |
Burr & Brown, PLLC |
代理人 |
Burr & Brown, PLLC |
主权项 |
1. A ceramic material comprising magnesium, zirconium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. |
地址 |
Nagoya JP |