DEVICE FOR PRODUCING A FREE COLD PLASMA JET

摘要

The invention relates to a device for producing a free, cold plasma jet (21) with a high-frequency plasma source (15) and a hollow body (11) which is transparent to electromagnetic radiation. Said hollow body (11) is provided with at least one gas inlet (10) and at least one jet outlet (13). The high-frequency plasma source (15) is especially a microwave plasma source or a high-frequency plasma source and first produces a cold glass plasma (12) at least inside the hollow body (11). Said glass plasma (12) is guided out of the hollow body (11) via the jet outlet (13) as a free, cold plasma jet which enters a working chamber (19). A vacuum exists in the working chamber (19). The free plasma jet (21) remains directed in the working chamber (19) and can be used for cleaning, etching or for plasma coating with a reactive gas.