| 摘要 |
PURPOSE:To make it possible to perform stable pressure detection without responding to rapid pressure change, by providing a minute opening part between a fluid introducing opening part and a diaphragm displaced corresponding to fluid pressure. CONSTITUTION:The electrical connection between an opposed side surface electrode 6 and the external terminal 8 thereof and a diaphragm 5 and the external terminal 9 thereof is performed by a conductive material through minute connecting holes respectively provided to the diaphragm 3 and opposed side surface 4. By this constitution, the fluid introduced from an opening part 1 acts on the diaphragm 3 while removing a component rapidly changed in fluid pressure at a minute opening part 2 to displace the diaphragm 3. This displacement imparts influence to a carbon particle 7 and changes the electric resistance value between the diaphragm electrode 5 and the opposed side surface electrode 6. Therefore, the pressure of the fluid introduced from the opening part 1 can be measured by measuring said resistance value. |
