MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19880138865-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01307217(A)	申请公布日期	1989.12.12
申请号	JP19880138865	申请日期	1988.06.06
申请人	CANON INC	发明人	SAKAMOTO MASARU
分类号	H01L21/266;H01L21/265	主分类号	H01L21/266
代理机构		代理人
主权项
地址

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