OPTICAL WAVEGUIDE TYPE PROBE, LIGHT DETECTING HEAD AND PRODUCTION OF THEM

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide type probe and a light detecting head low in cost and high in reliability. SOLUTION: The optical waveguide type probe 1 is constituted so that a channel type waveguide 7 having a light incident tip end 7a sharpened so as to be a size of light wavelength or less and having a photodetector 6 and an optical coupling part between the tip end and terminal thereof is formed on a semiconductor substrate on which the photodetector 6 is formed so as to be held between clad layers having a refractive index lower than that of the channel type waveguide 7. This optical waveguide type probe 1 is mounted on a slider 2 to constitute a light detecting head 3.